INTRODUCTION

Ion implantation and molecular beam epitaxy (MBE) are two of the critical deposition technologies used in semiconductor manufacturing. Implantation also plays an important role in other industrial applications such as enhancing the properties of medical devices and prolonging the life of industrial tooling and components.

There are several key implantation technologies. While beamline ion implantation is well established, the newer plasma immersion ion implantation (PIII) process is not yet widely accepted. However, the hybrid ion assisted deposition process, combining ion bombardment with a thin-film coating process such as physical vapor deposition (PVD), is becoming more common.

Several epitaxy technologies exist as well. The two principal processes are metal organic chemical vapor deposition (MOCVD) and MBE. Until about 1995, MOCVD was used almost exclusively for production epitaxial deposition and MBE was primarily an R&D tool. Now, several applications have emerged where MBE is superior to MOCVD, and MBE is being increasingly used in production.

A previous BCC report, GB-186C, entitled, Thin Layer Deposition: Highlighting Implantation and Epitaxy, Plasma, Thermal and Ion, was published in October 1996. This report studied a number of thin layer deposition technologies and covered ion implantation, epitaxy as a whole, including both MOCVD and MBE, together with CVD, PVD and thermal spray deposition. Updated reports on CVD, now including MOCVD and PVD were published in 2000. In addition, a 1998 report on high-performance ceramic coatings covered thermal spray, CVD, PVD and other ceramic coating techniques. As BCC has not studied either ion implantation or MBE since 1996, this report is intended as an update on these two technologies.

OBJECTIVES OF THIS STUDY AND ITS CONTRIBUTION

The principal objective of this study is to review ion implantation and MBE technologies and their applications, and to present a comprehensive analysis of their worldwide markets. To our knowledge, this is the only current published study of either technology, though some parts of the semiconductor implantation market are addressed in other publications.

A more specific goal is to examine the role of PIII compared with beamline ion implantation in each of the markets studied. At present, all production doping of semiconductor integrated circuits is done by beamline implantation, but the potential of PIII for ultrashallow doping and other applications has been promoted extensively. The process also has promise in applications to industrial materials, the purpose for which PIII was originally developed, and industrial PIII equipment is already used in commercial job shops.

Another goal is to separate the market for MBE epitaxial deposition from that for MOCVD epitaxial deposition. These two markets are generally combined. This makes it difficult to obtain strategic information about the more rapidly growing MBE segment.

AUDIENCE FOR THIS REPORT

This report is directed at companies and organizations interested in developments in ion implantation and MBE, including:

• manufacturers and suppliers of equipment for ion implantation and MBE
• companies involved in the development and manufacturing of integrated circuits, including foundries
• manufacturers and suppliers of silicon and compound semiconductor wafers
• providers of ion implantation contract services
• manufacturers of medical devices and equipment
• manufacturers and users of industrial tools, dies, molds and components
• companies involved in manufacturing and supplying advanced materials

SCOPE AND CONTENT OF REPORT

The report covers ion implantation and MBE technologies in depth, including their advantages, current and emerging applications, equipment and materials, and present and future markets. Within each market, forecasts of equipment shipments, services provided, and materials used are presented for the period from 2001 to 2006. A comparison of the year from 2000 to 2001 is included. All major equipment manufacturers and service providers in implantation and MBE are also profiled.

Each market is analyzed in detail. These analyses include product demand, the effect of economic conditions on market growth, manufacturing activity and the influence of other market forces. Market drivers are studied, including demand for implantation or MBE equipment and services. In addition, we discuss any significant trends observed in the industry that relate to the use of technology or materials. One example is the rapidly growing service markets in the semiconductor industry for merchant wafers manufactured by implantation and MBE.

A unique feature of the report is estimates of the present numbers of ion implanters and MBE reactors used for semiconductor production worldwide, by geographic region. The regional distribution of ion implanters and MBE reactors will affect future equipment demand. A feature of the forecasts for semiconductor equipment is a breakdown of shipments by type of implanter such as high current or specialty.

METHODOLOGY AND INFORMATION SOURCES

The data for this report were obtained primarily from interviews with more than 80 individuals in companies and research institutions engaged in ion implantation or MBE. These include manufacturers of implantation and MBE equipment and materials, service providers, industrial and consumer product manufacturing companies, and industry experts. Other data were obtained from company literature, reports and press releases, as well as technical and trade articles, government publications and the World Wide Web. BCC reports provided additional information.

ANALYST CREDENTIALS

Ralph B. Alexander, the author of this report, has been involved with ion implantation and other areas of surface engineering for 17 years. After cofounding and running an ion implantation service company, he became an independent consultant in coatings and surface modification processes for industrial applications. His most recent work centers on market analysis and market development. Dr. Alexander received his D.Phil. In physics from Oxford University.

INTRODUCTION

• OBJECTIVES OF THIS STUDY AND ITS CONTRIBUTION
• AUDIENCE FOR THIS REPORT
• SCOPE AND CONTENT OF REPORT
• METHODOLOGY AND INFORMATION SOURCES
• ANALYST CREDENTIALS
• RELATED BCC PUBLICATIONS
• REPORTS
• NEWSLETERS
• BCC ON-LINE SERVICES

EXECUTIVE SUMMARY

OVERVIEW

• KEY TECHNOLOGIES
• MAJOR APPLICATIONS
• TYPICAL MATERIALS
• INDUSTRY STRUCTURESEMICONDUCTOR MARKET
• MEDICAL MARKET
• INDUSTRIAL MARKET
• WORLDWIDE MARKETS FOR EQUIPMENT, SERVICES AND MATERIALS
• LEADING COMPANIES IN IMPLANTATION AND MBE

ION IMPLANTATION AND EPITAXY TECHNOLOGIES

• ION IMPLANTATION
• BEAMLINE ION IMPLANTATION
• PLASMA IMMERSION ION IMPLANTATION (PIII)
• ION-ASSISTED DEPOSITION
• ION BEAM ASSISTED DEPOSITION (IBAD)
• PLASMA IMMERSION ION IMPLANTATION WITH DEPOSITION (PIIID)
• PULSED ION BEAM SURFACE TREATMENT
• EPITAXY
• MOLECULAR BEAM EPITAXY (MBE)
• METAL ORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD)
• PATENT ANALYSIS
• PATENTS BY TECHNOLOGY
• PATENTS BY ORGANIZATION TYPE
• PATENTS BY WORLDWIDE REGION

ION IMPLANTATION AND EPITAXY INDUSTRY

• MARKET APPROACH
• IMPLANTATION AND EPITAXY INDUSTRY STRUCTURE
• LEADING IMPLANTATION AND MBE EQUIPMENT MANUFACTURERS
• LEADING SERVICE COMPANIES
• Contract Service Providers
• Semiconductor Merchant Wafer Suppliers
• CURRENT WORLDWIDE MARKET SHARES
• Equipment Manufacturing
• Services

ION IMPLANTATION AND EPITAXY IN THE SEMICONDUCTOR MARKET

• SEMICONDUCTOR APPLICATIONS - IMPLANTATION
• DOPING OF INTEGRATED CIRCUITS BY IMPLANTATION
• Plasma Doping
• SILICON-ON-INSULATOR (SOI) TECHNOLOGY
• Hydrogen Implantation and Wafer Bonding
• Oxygen Implantation (SIMOX)
• Comparison of Hydrogen and Oxygen Implantation Processes
• EMERGING APPLICATIONS OF IMPLANTATION
• Ultrashallow Junctions
• Modification of Dielectric Constant
• TYPES OF ION IMPLANTERS
• High-Current Implanters
• Medium-Current Implanters
• High-Energy Implanters
• Specialty Implanters for SOI and PIII
• SEMICONDUCTOR APPLICATIONS - EPITAXY
• EMERGING MBE APPLICATIONS
• Metamorphic High Electron Mobility Transistors (Metamorphic HEMTs)
• Quantum Well Lasers
• Compound Semiconductor on Silicon Wafers
• TYPES OF MBE SYSTEMS
• KEY MATERIALS USED IN SEMICONDUCTOR APPLICATIONS
• IMPLANTATION
• MBE
• THE SEMICONDUCTOR INDUSTRY
• SEMICONDUCTOR MARKET
• The Ubiquitous Chip
• Product Demand
• Compound Semiconductors
• TRADE ORGANIZATIONS AND TECHNOLOGY DEVELOPMENT
• International SEMATECH
• The Semiconductor Industry Association (SIA)
• Semiconductor Equipment and Materials International (SEMI)
• Technology Roadmap
• SEMICONDUCTOR GROWTH FACTORS
• Economic Conditions
• Manufacturing Activity
• Impact of Market Growth Factors
• SEMICONDUCTOR MARKET DRIVERS AND TRENDS
• IMPACT OF IMPLANTATION AND MBE
• Implantation Equipment Demand
• MBE Equipment Demand
• Larger Wafer Size
• Insourcing Model for Implantation Services
• Semiconductor Merchant Wafers
• FORECAST ASSUMPTIONS: IMPLANTATION AND MBE IN SEMICONDUCTORS
• FORECAST: VALUE OF IMPLANTATION AND MBE EQUIPMENT SHIPMENTS
• IMPLANTATION EQUIPMENT SHIPMENTS
• MBE EQUIPMENT SHIPMENTS
• FORECAST: VALUE OF IMPLANTATION AND MBE SERVICES
• IMPLANTATION CONTRACT SERVICES
• MERCHANT WAFER SERVICES
• FORECAST: VALUE OF IMPLANTATION AND MBE MATERIALS

ION IMPLANTATION IN THE MEDICAL MARKET

• MEDICAL INDUSTRY APPLICATIONS
• BIOMEDICAL APPLICATIONS OF ION IMPLANTATION
• Orthopedic Devices
• Polymeric Medical Products
• BIOMEDICAL APPLICATIONS OF IBAD/PIIID
• IBAD-coated Heart Valve Recall
• EMERGING APPLICATIONS OF ION IMPLANTATION AND IBAD/PIIID
• Radioactive Brachytherapy Seeds
• Tissue Engineering
• TYPES OF ION IMPLANTATION AND IBAD/PIIID EQUIPMENT
• KEY MATERIALS USED IN BIOMEDICAL APPLICATIONS
• THE MEDICAL INDUSTRY
• MEDICAL MARKET
• Product Demand
• Orthopedic Prostheses
• MEDICAL MARKET GROWTH FACTORS
• Economic Factors
• Health Care Cost Issues
• Impact of Market Growth Factors
• MEDICAL MARKET DRIVERS AND TRENDS
• IMPACT OF IMPLANTATION AND IBAD/PIIID
• Implantation Services Demand
• FORECAST ASSUMPTIONS: MEDICAL IMPLANTATION
• FORECAST: VALUE OF IMPLANTATION SERVICES
• FORECAST: VALUE OF IMPLANTATION MATERIALS

ION IMPLANTATION IN THE INDUSTRIAL MARKET

• INDUSTRIAL APPLICATIONS
• INDUSTRIAL APPLICATIONS OF ION IMPLANTATION
• INDUSTRIAL APPLICATIONS OF IBAD/PIIID
• ION IMPLANTATION OF TOOLING
• ION IMPLANTATION OF COMPONENTS
• ION IMPLANTATION AND IBAD/PIIID EQUIPMENT TYPES
• KEY MATERIALS USED IN INDUSTRIAL APPLICATIONS
• THE INDUSTRIAL MARKET
• INDUSTRIAL MARKET
• Product Demand
• Automotive Market
• Aerospace Market
• Technology Development Programs
• INDUSTRIAL MARKET GROWTH FACTORS
• Economic Conditions
• Manufacturing Activity
• Implantation Processing Cost Issues
• Impact of Market Growth Factors
• INDUSTRIAL MARKET DRIVERS AND TRENDS
• IMPACT OF IMPLANTATION AND IBAD/PIIID
• FORECAST ASSUMPTIONS: INDUSTRIAL IMPLANTATION
• FORECAST: VALUE OF IMPLANTATION EQUIPMENT SHIPMENTS
• FORECAST: VALUE OF IMPLANTATION SERVICES
• FORECAST: VALUE OF IMPLANTATION MATERIALS

APPENDIX: PROFILES OF MAJOR WORLDWIDE COMPANIES INVOLVED IN IMPLANTATION AND MBE AS EQUIPMENT MANUFACTURERS OR SERVICE PROVIDERS

• AEA TECHNOLOGY, PLC
• ASOCIACIÓN DE LA INDUSTRIA NAVARRA (AIN)
• APPLIED EPI, INC.
• APPLIED MATERIALS, INC.
• AXCELIS TECHNOLOGIES, INC.
• BEAMALLOY CORP.
• DANISH TRIBOLOGY CENTER
• EMPIRE HARD CHROME, INC.
• IBIS TECHNOLOGY CORP.
• IMPLANT CENTER, INC.
• IMPLANT SCIENCES CORP.
• ION IMPLANT SERVICES, INC.
• IQE INC.
• NISSIN ION EQUIPMENT CO.
• NORTH STAR RESEARCH CORP.
• PICOGIGA SA
• RIBER SA
• SILICON GENESIS CORP.
• SOITEC SA
• SOUTHWEST RESEARCH INSTITUTE
• SPIRE BIOMEDICAL INC.
• SUMITOMO EATON NOVA CORP. (SEN)
• TECH-NI-PLANT LTD.
• TECVAC LTD.
• TRIION A/S
• ULVAC CORP.
• UNIMERCO GROUP A/S
• VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
• VG SEMICON

LIST OF TABLES

1 KEY IMPLANTATION AND EPITAXY TECHNOLOGIES

2 MAJOR APPLICATIONS OF ION IMPLANTATION TECHNOLOGIES BY MARKET

3 MAJOR MBE APPLICATIONS

4 TYPICAL MATERIALS AND THEIR APPLICATIONS

5 VALUE OF WORLDWIDE SHIPMENTS OF ION IMPLANTATION AND MBE EQUIPMENT, THROUGH 2006

6 VALUE OF WORLDWIDE ION IMPLANTATION AND MBE SERVICES, THROUGH 2006

7 VALUE OF WORLDWIDE ION IMPLANTATION AND MBE MATERIALS, THROUGH 2006

8 SUMMARY OF VALUE OF WORLDWIDE ION IMPLANTATION, THROUGH 2006

9 SUMMARY OF VALUE OF WORLDWIDE MBE, THROUGH 2006

10 VALUE OF WORLDWIDE ION IMPLANTATION AND MBE EQUIPMENT SHIPMENTS, SERVICES AND MATERIALS BY MARKET, THROUGH 2006

11 LEADING COMPANIES IN THE IMPLANTATION BUSINESS

12 LEADING COMPANIES IN THE MBE BUSINESS

13 MAJOR TECHNICAL ADVANTAGES OF ION IMPLANTATION

14 KEY ADVANTAGES OF BEAMLINE IMPLANTATION

15 KEY ADVANTAGES OF PIII

16 MAJOR TECHNICAL ADVANTAGES OF IBAD/PIIID

17 MAJOR TECHNICAL ADVANTAGES OF MBE

18 U.S. ION IMPLANTATION AND MBE PATENTS BY TECHNOLOGY TYPE, 2000

19 U.S. MBE PATENTS BY ORGANIZATION TYPE, 2000

20 U.S. ION IMPLANTATION AND MBE PATENTS BY WORLDWIDE REGION, 2000

21 LEADING WORLDWIDE MANUFACTURERS OF IMPLANTATION AND MBE EQUIPMENT, 2001

22 LEADING WORLDWIDE IMPLANTATION CONTRACT SERVICE PROVIDERS, 2001

23 LEADING WORLDWIDE SUPPLIERS OF SEMICONDUCTOR MERCHANT WAFERS MANUFACTURED BY IMPLANTATION AND MBE, 2001

24 WORLDWIDE MARKET SHARES OF IMPLANTATION AND MBE EQUIPMENT MANUFACTURING BY REGION, 2001

25 INTEGRATED CIRCUIT CHARACTERISTICS

26 CURRENT AND EMERGING SEMICONDUCTOR APPLICATIONS OF ION IMPLANTATION

27 DOPANT SPECIES USED FOR IMPLANTS IN CMOS TRANSISTORS

28 ADVANTAGES AND DISADVANTAGES OF BEAMLINE IMPLANTATION FOR SEMICONDUCTOR PROCESSING

29 ADVANTAGES AND DISADVANTAGES OF PIII FOR SEMICONDUCTOR PROCESSING

30 COMPARATIVE ADVANTAGES OF IMPLANTATION PROCESSES FOR PRODUCING SOI WAFERS

31 CURRENT AND EMERGING COMPOUND SEMICONDUCTOR DEVICES MANUFACTURED BY MBE

32 KEY MATERIALS USED FOR ION IMPLANTATION IN SEMICONDUCTOR FABRICATION

33 KEY MATERIALS USED FOR MBE IN SEMICONDUCTOR FABRICATION

34 GROWTH POTENTIAL OF THE SEMICONDUCTOR MARKET, THROUGH 2006

35 WORLDWIDE SEMICONDUCTOR SALES, 1994-2001

36 WORLDWIDE SHARE OF SEMICONDUCTOR CONSUMPTION BY REGION, 2001

37 KEY TECHNICAL PROGRAMS SPONSORED BY SEMATECH

38 KEY GOALS OF THE SEMICONDUCTOR INDUSTRY ASSOCIATION

39 IMPACT OF MAJOR FACTORS ON THE GROWTH OF IMPLANTATION AND EPITAXY IN THE SEMICONDUCTOR INDUSTRY

40 WORLDWIDE GROWTH TRENDS IN IMPLANTATION EQUIPMENT FOR SEMICONDUCTORS, THROUGH 2000

41 WORLDWIDE DISTRIBUTION OF PRODUCTION ION IMPLANTERS FOR SEMICONDUCTORS BY REGION, 2001

42 WORLDWIDE DISTRIBUTION OF MBE REACTORS BY REGION, 2001

43 INSOURCING MODEL FOR IMPLANTATION SERVICES IN THE SEMICONDUCTOR MARKET

44 FORECAST ASSUMPTIONS: IMPLANTATION AND MBE GROWTH FOR SEMICONDUCTORS

45 VALUE OF WORLDWIDE SHIPMENTS OF IMPLANTATION EQUIPMENT FOR SEMICONDUCTORS, THROUGH 2006

46 WORLDWIDE SHIPMENTS OF IMPLANTATION EQUIPMENT FOR SEMICONDUCTORS BY IMPLANTER TYPE, THROUGH 2006

47 WORLDWIDE SHIPMENTS OF IMPLANTATION EQUIPMENT FOR SEMICONDUCTORS BY REGION, THROUGH 2006

48 VALUE OF WORLDWIDE SHIPMENTS OF MBE EQUIPMENT FOR SEMICONDUCTORS, THROUGH 2006

49 VALUE OF WORLDWIDE IMPLANTATION CONTRACT SERVICES FOR SEMICONDUCTORS, THROUGH 2006

50 VALUE OF WORLDWIDE IMPLANTATION AND MBE SERVICES FOR SEMICONDUCTOR MERCHANT WAFERS, THROUGH 2006

51 WORLDWIDE VALUE OF MATERIALS USED FOR IMPLANTATION IN THE SEMICONDUCTOR MARKET, THROUGH 2006

52 WORLDWIDE VALUE OF MATERIALS USED FOR MBE 999 IN THE SEMICONDUCTOR MARKET, THROUGH 2006

53 SUMMARY OF WORLDWIDE ION IMPLANTATION AND MBE EQUIPMENT SHIPMENTS, SERVICES AND MATERIALS FOR SEMICONDUCTOR MANUFACTURING, THROUGH 2006

54 CURRENT AND EMERGING BIOMEDICAL APPLICATIONS OF ION IMPLANTATION

55 CURRENT AND EMERGING BIOMEDICAL APPLICATIONS OF IBAD/PIIID

56 KEY MATERIALS USED FOR ION IMPLANTATION AND IBAD/PIIID IN THE MEDICAL MARKET

57 WORLDWIDE SHARE OF MEDICAL DEVICE PRODUCTION BY REGION, 2001 AND 2006

58 IMPACT OF MAJOR FACTORS ON THE GROWTH OF IMPLANTATION AND IBAD/PIIID IN THE MEDICAL INDUSTRY

59 WORLDWIDE GROWTH TRENDS FOR IMPLANTATION SERVICES IN THE MEDICAL INDUSTRY, THROUGH 2000

60 FORECAST ASSUMPTIONS ЃEIMPLANTATION GROWTH IN THE MEDICAL MARKET

61 VALUE OF WORLDWIDE IMPLANTATION SERVICES IN THE MEDICAL INDUSTRY, THROUGH 2006

62 WORLDWIDE MARKET SHARE OF IMPLANTATION SERVICES IN THE MEDICAL INDUSTRY BY APPLICATION, 2001 AND 2006

63 WORLDWIDE VALUE OF MATERIALS USED FOR ION IMPLANTATION AND IBAD/PIIID IN THE MEDICAL MARKET, THROUGH 2006

64 SUMMARY OF WORLDWIDE ION IMPLANTATION EQUIPMENT SHIPMENTS, SERVICES AND MATERIALS IN THE MEDICAL MARKET, THROUGH 2006

65 SURFACE PROPERTIES MODIFIED IN INDUSTRIAL APPLICATIONS OF ION IMPLANTATION

66 INDUSTRIAL APPLICATIONS OF IBAD/PIIID

67 BASIC TYPES OF INDUSTRIAL TOOLING SUITABLE FOR ION IMPLANTATION AND IBAD/PIIID

68 EXAMPLES OF INDUSTRIAL APPLICATIONS OF ION IMPLANTATION FOR TOOLING

69 EXAMPLES OF INDUSTRIAL APPLICATIONS OF ION IMPLANTATION FOR COMPONENTS

70 KEY MATERIALS USED FOR ION IMPLANTATION AND IBAD/PIIID IN THE INDUSTRIAL MARKET

71 U.S. SALES OF AUTOMOBILES AND LIGHT TRUCKS, 1994-2001

72 U.S. AEROSPACE SALES, 1994-2001

73 IMPACT OF MAJOR FACTORS ON THE GROWTH OF IMPLANTATION AND IBAD/PIIID IN THE INDUSTRIAL MARKET

74 FORECAST ASSUMPTIONS ЃEIMPLANTATION GROWTH IN THE INDUSTRIAL MARKET

75 VALUE OF WORLDWIDE SHIPMENTS OF IMPLANTATION EQUIPMENT IN THE INDUSTRIAL MARKET, THROUGH 2006

76 WORLDWIDE SHIPMENTS OF IMPLANTATION EQUIPMENT IN THE INDUSTRIAL MARKET BY SYSTEM TYPE, THROUGH 2006

77 VALUE OF WORLDWIDE IMPLANTATION SERVICES IN THE INDUSTRIAL MARKET, THROUGH 2006

78 WORLDWIDE VALUE OF MATERIALS USED FOR ION IMPLANTATION AND IBAD/PIIID IN THE INDUSTRIAL MARKET, THROUGH 2006

79 SUMMARY OF WORLDWIDE ION IMPLANTATION EQUIPMENT SHIPMENTS, SERVICES AND MATERIALS IN THE INDUSTRIAL MARKET, THROUGH 2006

LIST OF FIGURES

SUMMARY FIGURE:
VALUE OF WORLDWIDE ION IMPLANTATION INDUSTRY, 2000-2006

1 VALUE OF WORLDWIDE SHIPMENTS OF ION IMPLANTATION AND MBE EQUIPMENT, 2000-2006

2 VALUE OF WORLDWIDE ION IMPLANTATION AND MBE SERVICES, 2000-2006

3 LEADING WORLDWIDE SUPPLIERS OF SEMICONDUCTOR MERCHANT WAFERS MANUFACTURED BY IMPLANTATION AND MBE, 2001

4 WORLDWIDE MARKET SHARES OF IMPLANTATION AND MBE EQUIPMENT MANUFACTURING BY REGION, 2001

5 MAJOR TYPES OF DOPING IMPLANT FOR CMOS TRANSISTORS

6 WORLDWIDE GROWTH TRENDS IN IMPLANTATION EQUIPMENT FOR SEMICONDUCTORS, THROUGH 2000

7 WORLDWIDE DISTRIBUTION OF PRODUCTION ION IMPLANTERS FOR SEMICONDUCTORS BY REGION, 2001

8 WORLDWIDE DISTRIBUTION OF PRODUCTION MBE REACTORS BY REGION, 2001

9 WORLDWIDE SHIPMENTS OF IMPLANTATION EQUIPMENT FOR SEMICONDUCTORS BY IMPLANTER TYPE, 2000-2006

10 WORLDWIDE SHIPMENTS OF IMPLANTATION EQUIPMENT FOR SEMICONDUCTORS BY REGION, 2001-2006

11 VALUE OF WORLDWIDE SHIPMENTS OF MBE EQUIPMENT FOR SEMICONDUCTORS, THROUGH 2000-2006

12 VALUE OF WORLDWIDE IMPLANTATION AND MBE SERVICES FOR SEMICONDUCTORS, 2000-2006

13 WORLDWIDE GROWTH TRENDS FOR IMPLANTATION SERVICES IN THE MEDICAL INDUSTRY, 1996- 2000

14 VALUE OF WORLDWIDE IMPLANTATION SERVICES IN THE MEDICAL INDUSTRY, 2000-2006

15 WORLDWIDE MARKET SHARE OF IMPLANTATION SERVICES IN THE MEDICAL INDUSTRY BY APPLICATION, 2001 AND 2006

16 VALUE OF WORLDWIDE IMPLANTATION SERVICES IN THE INDUSTRIAL MARKET, 2000-2006